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MBE Chamber with In-Situ Surface Characterization Suite

 

 

An MBE chamber dedicated to surface and thin film studies of complex materials. This chamber is equipped with a variable temperature STM, LEED, Auger, a Mass spectrometer, sputter gun, gas manifold, and a variable temperature manipulator (40 K - 1500 K). Multiple deposition sources all capable of high precision deposition of sub-monolayer amounts of metals, semiconductors, or molecules

   
   

 Oak Ridge National Laboratory