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Thin-Film Battery Fabrication Steps

 

 

 

Deposition Sequence:    
1. Current collectors: dc magnetron sputtering.    
2. Cathode: rf magnetron sputtering or e-beam evaporation.    
(3. Optional high temperature anneal to crystallize cathode.)    
4. Lipon electrolyte: rf magnetron sputtering of Li3PO4.    
5a. Lithium anode: evaporation of Li metal. (red path)    
5b. Li-ion anode: rf or dc magnetron sputtering of SnO2-SiO2, Sn, Zn or In. (yellow path)    
5c. "Li-free" anode: dc magnetron sputtering of current collector. (green path)    
6. Multilayer protective coating: rf magnetron sputtering of Li3PO4 or parylene + Ti deposition.    

 

Deposition Rates of Thin-Film Battery Components*

Film

Film Deposition Rate (Å/min)
Pt and Ni current collectors

600
Cathode

> 100
Electrolyte, and overlayer for Li-free

> 100
Lithium anode

1800
SiTON anode

100
Parylene + Ti Protective coating (each layer)

900

 

*Sputter deposition rates for 2" diameter targets.

 

  

 

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Date revised - 3/23/2000 (njd)
http://www.ssd.ornl.gov/BatteryWeb/PlanView.html